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MEMSnet Home: MEMS-Talk: Refractive Index of Photoresists
Refractive Index of Photoresists
2007-02-09
Martyn Gadsdon
2007-02-09
Robert Black
2007-02-12
mohendra roy
2007-02-09
Bill Moffat
2007-02-09
Roger Shile
2007-02-13
Bill Moffat
2007-02-11
Shay Kaplan
Refractive Index of Photoresists
mohendra roy
2007-02-12
It is depend upon the intesity of the expose light on the substract.

On 09/02/07, Robert Black  wrote:
>
> In my experience, the refractive index does not change much between
> unexposed and exposed photoresist. The thickness of the resist is a bigger
> factor. This is why swing curves are used to determine what thickness to
> use.
>
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