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MEMSnet Home: MEMS-Talk: Re:In-situ Temperature Measurement
Re:In-situ Temperature Measurement
1998-05-15
mabin
Re:In-situ Temperature Measurement
mabin
1998-05-15
Hello:
You can simply make a temperature-test diode on the substrate beside of
your
circuit and connect it outside of your chamber to test it's built-in
potential under a certain temperature. You can get the substrate
temperature
after you calibrate that diode.


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