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MEMSnet Home: MEMS-Talk: SU-8 crack
Problem with PDMS removal from the SU-8 mold
2007-02-21
Vishwa
2007-02-22
Gareth Jenkins
2007-02-22
Beggans Michael H IHMD
2007-02-22
Vishwa
2007-02-22
Vishwa
2007-02-22
Joseph Grogan
2007-02-22
Jacques Jonsmann
2007-02-23
Vishwa
SU-8 crack
2007-02-23
Lujun Zhang
2007-02-23
Peng Li (Paul)
2007-02-23
Peng Li (Paul)
2007-02-23
Gareth
2007-02-26
Vishwa
2007-02-27
Barbara Cortese
2007-02-27
Vishwa
2007-02-27
Barbara Cortese
SU-8 crack
Lujun Zhang
2007-02-23
Dear all,

At the end of my process, I saw many cracks inside the SU-8 structures. Did
that happen to anyone before? If so, do you know in which step it might cause
the cracks ?

Thanks a lot!

Best regards
Lujun
reply
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