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MEMSnet Home: MEMS-Talk: Problem with PDMS removal from the SU-8 mold
Problem with PDMS removal from the SU-8 mold
2007-02-21
Vishwa
2007-02-22
Gareth Jenkins
2007-02-22
Beggans Michael H IHMD
2007-02-22
Vishwa
2007-02-22
Vishwa
2007-02-22
Joseph Grogan
2007-02-22
Jacques Jonsmann
2007-02-23
Vishwa
SU-8 crack
2007-02-23
Lujun Zhang
2007-02-23
Peng Li (Paul)
2007-02-23
Peng Li (Paul)
2007-02-23
Gareth
2007-02-26
Vishwa
2007-02-27
Barbara Cortese
2007-02-27
Vishwa
2007-02-27
Barbara Cortese
Problem with PDMS removal from the SU-8 mold
Gareth
2007-02-23
Try exposing even longer. (Don't worry about what the datasheet says - 50um
structures will be fine).
An image will become visible before PEB with a high enough dose which should be
good enough to align to.
If not, perhaps try a lower temperature PEB to reduce the stress.

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