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MEMSnet Home: MEMS-Talk: pmma lithography
pmma lithography
2007-02-25
Chen Han Lee
2007-02-25
[email protected]
2007-02-26
Jim Beall
2007-02-26
Chris Park
pmma lithography
Jim Beall
2007-02-26
google "UV expose PMMA" and you will find lots of info including the
Microchem datasheet on PMMA which includes the statement:
"DUV(deep UV): Low sensitivity, requiring doses >500mJ/cm2 at 248nm. "


On Feb 25, 2007, at 3:44 PM, [email protected] wrote:

> PMMA is used mostly for electron beam lithography (EBL).  I don't
> think it
> responds to UV light; although, I've never exposed PMMA.
reply
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