I am pretty sure one can expose PMMA with DUV light source.
People often use positive photoresist as a mask to DUV to pattern
transfer down to PMMA to make a lift-off structure.
Chris

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Chen Han Lee
Sent: Saturday, February 24, 2007 8:40 PM
To: [email protected]
Subject: [mems-talk] pmma lithography

hi all,

i am wondering if pmma can be patterned by UV radiation?
I know that the most common exposure source is X-ray, but is there
others?