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MEMSnet Home: MEMS-Talk: Wet etch chemistry for evaporated titanium
Gold on SU-8
2007-02-26
Yue Mun Pun, Jeffrey
2007-02-26
Kevin Paul Nichols
2007-03-05
Yue Mun Pun, Jeffrey
Wet etch chemistry for evaporated titanium
2007-02-27
Yue Mun Pun, Jeffrey
2007-02-27
Brent Garber
Wet etching Gold
2007-03-01
Yue Mun Pun, Jeffrey
Wet etch chemistry for evaporated titanium
Brent Garber
2007-02-27
Yue,

Just use H2O2.  Warm to 50c.

Brent

Yue Mun Pun, Jeffrey wrote:
> Hi,
> I need to etch Titanium in my device using a safe wet etch chemistry.  I
understand that HF is normally used to etch titanium films but this chemical is
too dangerous.  Can anyone suggest a safer wet etch chemistry?  Can I use
NH4OH:H2O2 chemistry to etch titanium?
reply
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