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MEMSnet Home: MEMS-Talk: I have a problem with su8 2100
I have a problem with su8 2100
2007-02-28
saravan kallempudi
2007-02-28
Gareth Jenkins
2007-02-28
g.balsubra manian
I have a problem with su8 2100
Gareth Jenkins
2007-02-28
You can use Omnicoat to improve adhesion on glass. Adequate adhesion is
possible without it but needs more careful wafer preparation and process.
Dehydration of the glass is very important and you have to carefully
optimise the baking steps. Can you be more specific as to where and how
in your process is it not working?


saravan kallempudi wrote:
> Hi'
> I was unable top get uniformed coating on the micro glass slides by using su8
2100.
> Can anyone help me to get a uniformed layer on the microglass slides. I worked
on wafers but it isnt working on glass slides.
>
reply
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