Hi!
I am looking for different methods of depositing piezoelectric polymer on
silicon wafer. Can anyone provide me some related information.
In first case I want to put a commercial polymer film on the silicon. After
this, I also want to make a polymer film in situ (using spin coating). For the
first case, I placed the commercial polymer film on a photoresist layer that was
spin coated on the silicon wafer. This was then kept under vacuum for one hour
and then the arrangement was heated for around 70 degree for 15 minutes. But,
this technique did not work. Can anyone provide me some information?

Thanks
Ravinder