I'm using resistive evaporation to put down various metals onto SU-8 and
onto plastic substrates and am seeing significant sample heating which
seems to be causing as little as some reflow or as much as unidentified
hazy thin films around the sample.

I will be trying to move my metal source (resistive canoe) away from the
sample to alleviate this, but I was wondering what the preferred method
of depositing metals onto polymers was: resistive, e-beam bombard, or
sputtering?

Thanks,
-Jon Fox