Hi Jon,

You can use either e-beam or sputtering to deposit metals on SU-8 or on
plastics.

If you are using these metals as contacts in MEMS or microfluidics, it is
better to do it by sputtering.
Since e-beam and thermal evaporation are line of sight deposition
techniques, there is dicontinuity in the metal film due to shadowing across
the previous structures.

Samadhan


----- Original Message -----
From: "Jon Fox" 
To: "General MEMS discussion" 
Sent: Thursday, March 01, 2007 5:18 PM
Subject: [mems-talk] Depositing metals onto plastics and SU-8


> I'm using resistive evaporation to put down various metals onto SU-8 and
> onto plastic substrates and am seeing significant sample heating which
> seems to be causing as little as some reflow or as much as unidentified
> hazy thin films around the sample.
>
> I will be trying to move my metal source (resistive canoe) away from the
> sample to alleviate this, but I was wondering what the preferred method
> of depositing metals onto polymers was: resistive, e-beam bombard, or
> sputtering?