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MEMSnet Home: MEMS-Talk: Problems with evaporating Titanium
Problems with evaporating Titanium
2007-03-02
Yue Mun Pun, Jeffrey
2007-03-02
David Nemeth
2007-03-02
Brent Garber
2007-03-03
Yue Mun Pun, Jeffrey
2007-03-03
Jon Fox
Problems with evaporating Titanium
Brent Garber
2007-03-02
David Nemeth wrote:
> Ti is tough to thermally evaporate.  If you can get away with Cr (also a
> good adhesion layer for gold), then something like this:
>
> http://www.lesker.com/newweb/Deposition/Evaporation_Sources/Thermal_Rods.cfm
>
> might work.  (There are other manufacturers besides Lesker).  I used these
> all the time, with good results.
>
> David Nemeth
>

I agree with David and use the Cr rods he suggests in my BOC Edwards
Auto 306.

Brent

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