You are right Roger. E-Beam is not going to be a cool process. In my
experience Sputtering should give you near room temperature (RT +
10'C-15'C) deposition.

Cheers

Mantavya Sinha
PhD Student
Dept of ECE
NUS


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Roger Shile
Sent: 03 March 2007 09:41 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Depositing metals onto plastics and SU-8


Contrary to many postings here, E-beam evaporation is thermal
evaporation; the charge is not cool by any means.

Roger Shile