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MEMSnet Home: MEMS-Talk: Problems with evaporating Titanium
Problems with evaporating Titanium
2007-03-02
Yue Mun Pun, Jeffrey
2007-03-02
David Nemeth
2007-03-02
Brent Garber
2007-03-03
Yue Mun Pun, Jeffrey
2007-03-03
Jon Fox
Problems with evaporating Titanium
Yue Mun Pun, Jeffrey
2007-03-03
Brent,
Thanks for the recommendation.  Yes, I did try Chromium, which is not as easy
compared to Titanium either.  And I know that Chromium is a good adhesion layer
for gold too.  The reason for using to Titanium is because Chromium inhibits
Poymerase Chain Reaction, while Titanium is biocompatible.  However, I need to
evaporate Titanium on uncrosslinked SU-8, which is why I am trying to thermally
evaporate Titanium on SU-8.  I am well aware that Titanium is tough to thermally
evaporate.  However, if uncrosslinked SU-8 2050 is safe from being crosslinked
when Titanium is being deposited in an e-beam evaporator, I would gladly
evaporate Titanium in the e-beam evaporator, which is easier by far.

Jeffrey

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