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MEMSnet Home: MEMS-Talk: etch gold or lift-off?
etch gold or lift-off?
2007-03-03
Yitian Peng
2007-03-03
Nicolas Duarte
2007-03-03
Yitian Peng
2007-03-05
Michael Rust
2007-03-05
Bill Moffat
etch gold or lift-off?
Yitian Peng
2007-03-03
Please give some advice:
I want to fabricate the patterned gold on quartz substrate.
But the thickness of the gold is more than 1micro,
the minimum dimension of the pattern is 10 micro.
What process Should I use?? etch gold or lift-off,
Is there some problems about the two kinds of process??

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