Mantavya,

Go to the back of the classroom with Roger.  You can cool a substrate in an
e-gun evaporation if you want.  Sputtering always produces heat to the
substrate.  Roger brought up the charge (source) heat, who cares?
Substrate heat was the issue.

Brent


You are right Roger. E-Beam is not going to be a cool process. In my
experience Sputtering should give you near room temperature (RT +
10'C-15'C) deposition.

Cheers

Mantavya Sinha
PhD Student
Dept of ECE
NUS


Contrary to many postings here, E-beam evaporation is thermal
evaporation; the charge is not cool by any means.

Roger Shile