MEMS-talk

News	MEMSnet Home: MEMS-Talk: Recipe and procedure to etch Ti and Gold Recipe and procedure to etch Ti and Gold 2007-03-06 [email protected] 2007-03-06 Zhiwei Zou Microwave and quartz glass tube 2007-03-06 wahid YEMI. 2007-03-06 [email protected] 2007-03-06 Yue Mun Pun, Jeffrey 2007-03-06 Yue Mun Pun, Jeffrey Recipe and procedure to etch Ti and Gold [email protected] 2007-03-06 Hi everyone Can you give the recipe and procedure of etch the Ti and Gold. Ti(6nm) Gold(50nm) Thank you very much. Yitian reply
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