Jesse,
I may not have been the original poster, but I am also attempting to evaporate
metals (Titanium or Gold) on uncrosslinked SU-8 2050.  Titanium evaporates in an
e-beam evaporator at a relatively low process pressure of 5e-7 millibars.
However, I am not sure about the sublimation temperature nor the intensity of
the glow of the light while Titanium is being evaporated.
I need to evaporate about 25-30nm Titanium on uncrosslinked SU-8 to use this
layer as a UV mask for subsequent i-line patterning as well as a good adhesion
layer between SU-8 and gold.  It has been reported that Chromium films of at
least 25nm is sufficient to block UV light, but I am not so sure of Titanium.
Can anyone advise on this matter?

Mr. Jeffrey Mun Pun YUE
Division of Bioengineering
Block E3, #05-18, Nanobioanalytics Lab
9 Engineering Drive 1
National University of Singapore
Singapore 117576
Tel: (65) 65165985, Fax: (65) 68723069
E-mail:  [email protected]

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Jesse D Fowler
Sent: Tuesday, March 06, 2007 1:04 AM
To: General MEMS discussion
Subject: [mems-talk] Depositing metals onto plastics and SU-8

Hello original poster!

I can't find the original email about this, but if I remember properly,
the poster wants to deposit onto un-crosslinked (unexposed SU-8).

Something important to think about is what effect the brightly glowing
source is going to have on your photosensitive substrate.

I don't know if the source glows at the proper wavelength to expose SU-8,
but I do know that it's bright enough that we don't look at it without a
welding glass. At least, in an evaporator.

I understand there's a glowing plasma in a sputterer, as well. But, I
don't know how bright that is.

Is your process going to get messed up if the SU-8 is exposed by the metal
deposition method?
What if it's only partially exposed?

If so, you're probably going to have to do a few experiments to find a
solution.