Hi Yitian,

Use diluted HF (0.5%) to etch Ti and KI:I2:H2O=4:1:40 to etch Au.


Sincerely,
Zhiwei Zou
Graduate Research Assistant
MicroSystems and BioMEMS Laboratory
Center for BioMEMS and NanoBiosystems
Department of Electrical and Computer Engineering
919 Rhodes Hall, Cincinnati, Ohio 45221-0030
University of Cincinnati
(Phone): 513-556-0852 (Fax): 513-556-7326
(E-mail): [email protected]
(Website): http://www.ece.uc.edu/~zouz

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of [email protected]
Sent: Monday, March 05, 2007 6:24 PM
To: General MEMS discussion
Subject: [mems-talk] Recipe and procedure to etch Ti and Gold

Hi everyone
  Can you give the recipe and procedure of etch the Ti and Gold.
Ti(6nm) Gold(50nm)