Hi Zhiwei
   thanks.
How can I do it?
imerse the substrate into the KI:I2:H20 first
then imerse into the HF??
Best
Yitian




Quoting Zhiwei Zou :

> Hi Yitian,
>
> Use diluted HF (0.5%) to etch Ti and KI:I2:H2O=4:1:40 to etch Au.
>
>
> Sincerely,
> Zhiwei Zou
> Graduate Research Assistant
> MicroSystems and BioMEMS Laboratory
> Center for BioMEMS and NanoBiosystems
> Department of Electrical and Computer Engineering
> 919 Rhodes Hall, Cincinnati, Ohio 45221-0030
> University of Cincinnati
> (Phone): 513-556-0852 (Fax): 513-556-7326
> (E-mail): [email protected]
> (Website): http://www.ece.uc.edu/~zouz
>
> -----Original Message-----
> From: [email protected] [mailto:[email protected]]
> On Behalf Of [email protected]
> Sent: Monday, March 05, 2007 6:24 PM
> To: General MEMS discussion
> Subject: [mems-talk] Recipe and procedure to etch Ti and Gold
>
> Hi everyone
>   Can you give the recipe and procedure of etch the Ti and Gold.
> Ti(6nm) Gold(50nm)
> _______________________________________________