Hi!
I am looking for methods to deposit piezoelectric polymer on silicon wafer. Can
anyone provide me some  information?
In first case I want to put a commercial polymer film on the silicon. After
this, I also want to make a polymer film in situ (using spin coating).
For the first case, I placed the commercial polymer film on a photoresist layer
that was spin coated on the silicon wafer. This was then kept under vacuum for
one hour and then the arrangement was heated for around 70 degree for 15
minutes. But, this technique did not work. Can anyone provide me some
information?

Thanks
Ravinder