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MEMSnet Home: MEMS-Talk: Wet Etching SiO2 using PMMA
Wet Etching SiO2 using PMMA
2007-03-06
Leyla Soleymani
2007-03-06
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Wet Etching SiO2 using PMMA
Leyla Soleymani
2007-03-06
Hi,
Does anyone know if PMMA can be served as a wet etch mask for BOE of
SiO2. I have 520nm of SiO2 on Glass/Ti/Gold and I have access to
Microchem PMMA 950,000 A2. Is it possible to use the PMMA as a mask to
etch the oxide  using HF. If so, does anyone know a sample procedure.
Regards,
Leyla Soleymani
University of Toronto
(416)978-8935
reply
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