Hi,
Does anyone know if PMMA can be served as a wet etch mask for BOE of
SiO2. I have 520nm of SiO2 on Glass/Ti/Gold and I have access to
Microchem PMMA 950,000 A2. Is it possible to use the PMMA as a mask to
etch the oxide  using HF. If so, does anyone know a sample procedure.
Regards,
Leyla Soleymani
University of Toronto
(416)978-8935