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MEMSnet Home: MEMS-Talk: lift-off
lift-off
2007-03-09
[email protected]
2007-03-10
Nicolas Duarte
2007-03-12
Rashid, Mamun
lift-off
Nicolas Duarte
2007-03-10
That sounds like you have not completely stripped the photoresist
which can happen if you do liftoff with acetone.  I suggest doing an
oxygen plasma for a minute or two and see if your non patterend area
clears up.

Nicolas Duarte
PhD Candidate under Dr Srinivas Tadigadapa
Electrical Engineering
The Pennsylvania State University

At 3:29 PM -0700 3/9/07, [email protected] wrote:
>I have lift-off the gold on photoresist.
>But some part of the pattern is very clear,but other area is not.
>What reason can cause the phenomena?????
reply
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