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Among the different kinds of micromachined silicon microphones
dedicated to human speech, we are interested in the
piezoelectric type using thin film PZT (lead zirconate titanate)
piezo-electric ceramic.
    But it seems that PZT films on Si-wafer are mainly used as force
sensors, ultrasonic micro-actuators, acoustic imaging or sonar
transducers.
    Is there any particular reason to explain this?

    Please send me any suggestion on that subject.
 Thank you !
   Christophe LE TOUZE.

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