Hi,
Let's say I successfully coat uncrosslinked SU-8 with thermally evaporated
Chromium or Titanium to a thickness of 30-50nm and the underlying SU-8 remains
uncrosslinked.  Subsequently I would like to pattern 300nm of Gold on this film
using e-beam evaporation and lift-off process.

Can anyone tell me how do I prevent the underlying SU-8 from heating up beyond
65'C, which is the 1st set temperature for the soft bake or PEB?  Do I need to
do the e-beam evaporation in steps then?

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  [email protected]