Li Peng,
Thanks.  This is my first real multi-layer SU-8, which I am trying out.  =
I will be attempting the thinner SU-8 2002 soon hopefully.
=20
Jeffrey

________________________________

From: [email protected] on behalf of Peng Li (Paul)
Sent: Tue 3/20/2007 10:32 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Dimples in SU-8 film

Hey Jeffrey,

>From my experiences, two methods may be helpful:

1. The dimples may form after spin coating. You can level the SU-8 for
30mins after spin coating. This can make the su-8 "smooth out".

2. Another way which is always beneficial is that you can prewet the =
wafer
with a thinner su-8, e.g 2002. This can homogenize your surface.

These all work perfectly for me. Hope this may help.

Peng Li