Hi,

I am using PMMA A2 or PMMA A3 for ebeam lithography. In order to get a
better BOE etch mask, I would liket to have a thick PMMA layer. Can I
spin the PMMA multiple times? If so does anyone know if I should
softbake and respin or spin multiple times before softbake? I would
really appreciate your help.

Regards,
Leyla Soleymani
University of Toronto