Try the Manufacturer.
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Peng Li (Paul)
Sent: Monday, March 26, 2007 1:49 PM
To: [email protected]
Subject: [mems-talk] Spin coating PDMS on wafer
Dear friends,
I want to spin coat PDMS on glass wafer to get 50um thickness layer.
Does
anybody know where can I find data of PDMS thickness corresponding to
spin
speed?
Thanks!
Peng
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