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MEMSnet Home: MEMS-Talk: Spin coating PDMS on wafer
Spin coating PDMS on wafer
2007-03-26
Peng Li (Paul)
2007-03-27
g.balsubra manian
2007-03-27
Kevin Christ
2007-03-26
Roger R. Shile
2007-03-27
Lee, Hyung-Kew
Spin coating PDMS on wafer
Roger R. Shile
2007-03-26
Try the Manufacturer.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Peng Li (Paul)
Sent: Monday, March 26, 2007 1:49 PM
To: [email protected]
Subject: [mems-talk] Spin coating PDMS on wafer

Dear friends,

I want to spin coat PDMS on glass wafer to get 50um thickness layer.
Does
anybody know where can I find data of PDMS thickness corresponding to
spin
speed?
Thanks!

Peng


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