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MEMSnet Home: MEMS-Talk: Solvent spin-on PDMS
Solvent spin-on PDMS
2007-03-29
Benedict Samuel
2007-03-30
Joseph Grogan
2007-03-30
Keunho Ahn
2007-03-30
Barbara Cortese
2007-03-30
Heiko van der Linden
Tungsten 'W' etch
2007-03-30
shimul saha
2007-03-30
Anil Agiral
2007-03-31
Andrea Mazzolari
Silicon carbide wet etch
2007-03-30
Andrea Mazzolari
Solvent spin-on PDMS
Heiko van der Linden
2007-03-30
Maybe a treatment in a UV/Ozone reactor would work for you.
This also oxidizes the PDMS but is not so strong as an oxygen
plasma reaction...

Regards,
Heiko van der Linden

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Barbara Cortese
Sent: vrijdag 30 maart 2007 8:54
To: mems-talk
Subject: Re:[mems-talk] Solvent spin-on PDMS


Can anyone direct me to a process that can make PDMS surface very
hydrophillic and the effect to last for atleast 30 mins?

An oxygen RIE treatment will do just fine..but it will last 1 day!
reply
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