One that comes to my mind is yttrium, barium, copper oxide perovskite
ceramic.  This material has sheet conductivity in the copper oxide
planes.  That is the conductivity is high at the room temperature and is
anisotropic.  But the conductivity is not as good as for metals but is
high compared to semiconductors.  This material is superconducting at
liquid nitrogen temperature but you may not need that property.

The only other way to get conductivity in one direction but insulation
in other two directions is to make a pattern with aluminum lines and
oxide lines in the fashion you like.


~~~~~~~~~~~~~~~~~~~
Dr. Alex Freeman
Engineering Manager, Etch Group
Ball Semiconductor, Inc.
972-359-2442
[email protected]
~~~~~~~~~~~~~~~~~~~


> ----------
> From:         [email protected][SMTP:[email protected]]
> Sent:         Sunday, June 14, 1998 2:18 PM
> To:   [email protected]
> Subject:      material conducting in 1 direction, and insulating in
> the other 2...
>
> Dear MEMS experts,
>
> I am looking for a material that is conductive in only one direction,
> and
> insulating in the other two...  Please help if you can.  Thank you.
>
> MZ
>
>


From ROLAND A. LEVY, DISTINGUISHED PROFESSOR OF PHYSICS, NJIT; TEL.   Wed Jun 17
15:07:45 1998
To: [email protected]
Subject:   RE: Info on HiPox......
From:   "ROLAND A. LEVY, DISTINGUISHED PROFESSOR OF PHYSICS, NJIT; TEL.
Date: Wed Jun 17 15:07:45 1998
Lines: 12

Aravind:

If you wish to use HiPox for growing thick silicon dioxide films, I have a
LPCVD process for growing thick (10-15 microns) films. I am using such thick
oxide films as waveguides for optical sensors. The films are uniform crack-
free,and optically transparent. I have also a LPCVD process for growing thick
phosphosilicate glass (PSG). The presence of the P changes the refractive index
of the oxide so that the combination of PSG and silicon dioxide can be used
as core and clad structures of a waveguide.

Should you be interested, I would be happy to help out.

Roland Levy