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MEMSnet Home: MEMS-Talk: Silicon carbide wet etch
Solvent spin-on PDMS
2007-03-29
Benedict Samuel
2007-03-30
Joseph Grogan
2007-03-30
Keunho Ahn
2007-03-30
Barbara Cortese
2007-03-30
Heiko van der Linden
Tungsten 'W' etch
2007-03-30
shimul saha
2007-03-30
Anil Agiral
2007-03-31
Andrea Mazzolari
Silicon carbide wet etch
2007-03-30
Andrea Mazzolari
Silicon carbide wet etch
Andrea Mazzolari
2007-03-30
Hi All,
I need to realize wet etch of silicon carbide single crystals.
Can anyone provide me informations about this? It seams that silicon carbide
it very hard to wet etch...

Best regards,
Andrea

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