Sreemanth:

Typically a Piranha clean will not damage Chromium but if you have pinholes it
will attach the aluminum underneath quite drastically. To be safe you might want
to try removal in a downstream plasma ash system using oxygen/nitrogen. This
should not damage either film and should do a good job removing organics from
the surface. Bob Henderson

-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Wed, 4 Apr 2007 2:27 PM
Subject: [mems-talk] Organic residue etching

Hello All,

I am working with Chromium/Aluminum/Chromium coated quartz substrates and I am
trying to etch some organic residues sticking to the top chromium film. I have
seen in the literature that Piranha or RCA are recommended for organic residue
etching. I am wondering if these solutions are going to affect the underlying
metal films as well (which I definitely do not want to happen). Please let me
know if you have any suggestions.