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MEMSnet Home: MEMS-Talk: Is CTFE (Fluorocarbon) tweezer good for clean room process?
Is CTFE (Fluorocarbon) tweezer good for clean room process?
2007-04-05
Steven Yang
Is CTFE (Fluorocarbon) tweezer good for clean room process?
Steven Yang
2007-04-05
I am doing RCA clean for my tiny samples. Normally, the suggestion is
using PTFE tweezers. However, as it is not avaiable in short time. I
am wondering whether CTFE tweezer is also a safe choice for this
process?

and for other clean room processes which normally done with PTFE
tweezer, like etching, anyone knows CTFE can do it too or not?

or alternatively, can you point out what PTFE can do while CTFE can
not do? and in reverse way.

Thank you very much!
reply
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