Hello:

It's possible to bond SiN to Si, no matter LPCVD, PECVD or sputtering,
provided the surface of SiN is treated properly. The treatments include
hydrophilic treatment, CMP if necessary. You can even bond them at
reasonable low temperature indeed. There are several references on this
topic.

Good luck,

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JIAO Jiwei, Ph. D

Thin Film Technology Dept.
Advanced Technology R&D Center
Mitsubishi Electric Corporation
Email: [email protected]

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