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MEMSnet Home: MEMS-Talk: KOH etch
SU-8 adhesion on NOA61
2007-04-05
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KOH etch
2007-04-07
Andrea Mazzolari
KOH etch
Andrea Mazzolari
2007-04-07
Hi all, i'm looking for informations about etch rate and surface quality
of (110) and (100) silicon wafers etched in saturated KOH solutions.
Please note that i'm not interested to ipa-saturated solutions, but KOH
silicon-saturated solutions.
Can someone suggest a good article ? I can not find anything useful.

Best regards and happy easter!
Andrea
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