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MEMSnet Home: MEMS-Talk: CF4 etch of glass SiO2?
CF4 etch of glass SiO2?
2007-04-09
Andrew Xiang
CF4 etch of glass SiO2?
Andrew Xiang
2007-04-09
Has anyone etched Glass using CF4 plasma? Can you visually see the effect? Does
it reduce the reflectivity of the glass by making the glass surface less smooth?

thanks
Andrew
reply
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