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MEMSnet Home: MEMS-Talk: PMMA and LOR (PMGI) intermixing question
PMMA and LOR (PMGI) intermixing question
2007-04-10
Chris Park
PMMA and LOR (PMGI) intermixing question
Chris Park
2007-04-10
HI All
If I have a patterned PMMA on the wafer and wants to put PMGI or LOR
from MicroChem on the PMMA and bake, would it modify the patterns on
PMMA or cause the interfacial scums between PMMA and PMGI?
Thanks you in advance
Chris Park

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