Hello All,

I am trying to perform Chemical Mechanical polishing (CMP) of Aluminum thin
films coated on quartz substrates to make the Aluminum film smooth. I found
that this has been done by others in the past. I am wondering what the
maximum smoothness from this process is? I need a roughness of less than 10
nm. Please let me know if anyone has experience in this area.

Thanks,
Sreemanth