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MEMSnet Home: MEMS-Talk: AZ5214E conditions
AZ5214E conditions
2007-04-11
Yue Mun Pun, Jeffrey
AZ5214E conditions
Yue Mun Pun, Jeffrey
2007-04-11
Hi,
Can anyone tell me what is the typical processing conditions for processing
AZ5214E when it is spun coated at 4000rpm in terms of the exposure dose to be
used as well as the developer time if AZ Developer is used?

Jeffrey
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