Could you use a FIB to deposit Pt? Your university has one....
-----Original Message-----
From: P. Balaji 
To: [email protected] 
Date: Thursday, June 18, 1998 4:25 PM
Subject: Pt evaporation


>Hello Mems experts,
>
>I want to evaporate 1000 A of pt on my substrate. The problem is the
>tungsten filament is getting too hot and the quartz crystal monitor which
>monitors the thickness is also getting too hot. Is there a way for
>avoiding the heat on the crystal monitor or is there some other easy way
>of evaporation. I have difficulty specially with platinum.The crystal
>monitor is already water cooled.
>
>Thanks for your time and any kind of ideas is appreciated
>baloo
>
>Balaji Panchapakesan
>Department of Mechanical Engineering
>University of Maryland, College Park MD20740
>
>Email:[email protected]
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