A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Tungsten 'W' etch
Tungsten 'W' etch
2007-04-15
shimul saha
Tungsten 'W' etch
shimul saha
2007-04-15
Hello,

Thanks for your suggestion. We have tried with H2O2 to etch tungsten, but it
looks the solution attacks the resist (HiPR 6517) much quicker than 'W'. Can you
please suggest any Resist ( which can sustain enogh time) or methods to etch
effciently tungsten. Any advice will be greatly helpful.

Thanking you.

Best regards,
Shimul Chandra Saha
IET/NTNU
7491 Trondheim, Norway.

----- Original Message ----
From: Anil Agiral 
To: General MEMS discussion 
Sent: Friday, March 30, 2007 4:24:41 PM
Subject: Re: [mems-talk] Tungsten 'W' etch


Hello,

You can try H2O2 which is used to etch TiW. It should work well with W
etching also.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
MEMS Technology Review
University Wafer
The Branford Group