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MEMSnet Home: MEMS-Talk: Removal of HMDS Prime
Removal of HMDS Prime
2007-04-18
Roger Shile
Removal of HMDS Prime
Roger Shile
2007-04-18
It's my understanding that a piranha clean will remove all effects of an
HMDS vapor prime on SiO2.  Is this true?  We have been experiencing
photoresist adhesion failure.  The question arose as to whether we might
be over-priming the wafers after stripping resist in piranha and
re-priming.

Roger Shile
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