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MEMSnet Home: MEMS-Talk: Etching of lead-magnesium-niobium-lead titanate (PMN-PT film)
SOG etchant compatible to Al2O3
2007-04-24
Dong Cai
Etching of lead-magnesium-niobium-lead titanate (PMN-PT film)
2007-04-24
Rachel Tan
Silicon stiffness matrix
2007-04-24
Andrea Mazzolari
Etching of lead-magnesium-niobium-lead titanate (PMN-PT film)
Rachel Tan
2007-04-24
  Hi,

  Has anyone worked with the etching (either dry or wet) of lead-magnesium-
niobium-lead titanate (PMN-PT) single crystal films? Is there any etching
process available to thin down a layer of PMNPT material?

  Thanks for the help!

  Rachel
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