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MEMSnet Home: MEMS-Talk: Silicon stiffness matrix
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Silicon stiffness matrix
2007-04-24
Andrea Mazzolari
Silicon stiffness matrix
Andrea Mazzolari
2007-04-24
Hi all,
i'm looking for stiffness matrix of silicon wafers (110) and (111). I've
found  stiffness matrix for (100) silicon, but it is quite tedious to
calculate stiffness matrix in (110) and (111) systems. Any idea where to
find those stiffness matrix ?

Best regards,
Andrea
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