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MEMSnet Home: MEMS-Talk: Re: microaccelerometer
Re: microaccelerometer
1998-06-29
Ruan Hongning
Re: microaccelerometer
Ruan Hongning
1998-06-29
Xu Jun wrote:
>
> hello!
>
> i want to know the consequence if the voltage on electrode-plates
> (fingers) of a microaccelerometer is unstable (for example, changes between
> -5% and +5%)?
>
> best regards
>
> ***--------------------------------------***
>     Mr. Xu Jun
>     Dept of MPE
>     The National University of Singapore
>     10 Kent Ridge Crescent, Singapore 119260
>     E-mail:[email protected]
> ***--------------------------------------***
>
>
You can calculate according to a pair of differential parallel plate
capacitors.The consequence is " negative" electrostatic spring rate and
feedback force unstable. I've investigated the problem, if you have
further questions, please tell me.

By the way, Is NUS investigating microaccelerometer or MEMS? What does
Dept. of MPE mean?

Ruan Aiwu


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