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MEMSnet Home: MEMS-Talk: SOG removal
SOG removal
2007-04-25
Indusekhar
SOG removal
Indusekhar
2007-04-25
SOG removal:
If you have not baked , it can be removed with IPA.
IF SOG is baked after coating, you can etch with buffered HF solution.

Indusekhar
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