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MEMSnet Home: MEMS-Talk: Nit and Oxide etching.
Nit and Oxide etching.
2007-04-25
cal Bear
2007-04-25
[email protected]
Nit and Oxide etching.
cal Bear
2007-04-25
hello,

I am trying to find a way to etch Nit faster than silicon oxide layer (under
the same conditions).
I am hoping get 50:1 type of etching ratio (more nitride removal than the
oxide layer).  We have tried a couple of things but nothing has really
panned out...any suggestions?

Mike

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