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MEMSnet Home: MEMS-Talk: Re: about etchants of Nichrome
Re: about etchants of Nichrome
1998-06-27
bob lyness
1998-06-29
Armin Kuebelbeck
Re: about etchants of Nichrome
Armin Kuebelbeck
1998-06-29
Try Ammonia Cer (IV) nitrate in Nitric Acid. Merck (the German chemical
supplier) has ready to use mixtures. They are dedicated to etch
chromium, but should work with Nichrome as well.
They have 2 different products:
Issue No. 1.11547 Chromium Etchant VLSI
Issue No. 1.10602 Chromium Etchant H VLSI
Normally it's used for chromium masks.

Best regard

Armin

P.S.: Has anyone a good wet etchant for Tungsten.

>From [email protected] Sat Jun 27 12:20:43 1998
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>Message-Id: <[email protected]>
>Date: Fri, 26 Jun 1998 05:24:06 -0700 (PDT)
>From: [email protected]
>Subject: about etchants of Nichrome
>To: [email protected]
>X-URL: http://mems.isi.edu/mems.html
>Reply-To: [email protected], [email protected]
>
>
> I want to know how to make etchants of Nichrome which can be used with
resist !
>
>
>Tang Yanghua
>
>
>


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