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MEMSnet Home: MEMS-Talk: su8 fabrication problem
su8 fabrication problem
2007-04-26
li chunyu
2007-04-27
Gareth Jenkins
2007-04-27
Gwennou Coupier
su8 fabrication problem
li chunyu
2007-04-26
Recently I fabicated su8 mold and encountered some problem.
First,after soft bake,there are some  wrinkles on the rim of dish and some
pit on the surface,especially when using su8 75.
Second,after development, there are some crackles on the surface of su8
molding
Thanks advanced
reply
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