ask for reference on gold-gold thermal compress wafer
bonding
胡小东
2007-04-27
Hi,All,
Would someone give some useful references on gold-gold thermal compress
wafer bonding?
I'd like to bonding wafers by this mean. There is a book named
"semiconductor wafer bonding: science and technology". I'm buying it, but it
will takes months for us to get the book.
So any electronic version paper on the subject?
Thanks!
Hu Xiaodong
[email protected]
Hebei Semiconductor Research Institute